AAWSAP DIRD, Biosensors and BioMEMS: A Survey of the Present Field, March 2010

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NASA Space Applications for Microfluidic Systems ........................................... 34
Microcantilever MEMs Sensors ............................................................................. 36
Conclusion ............................................................................................................ 39
Figures
Figure 1. Varieties of BioMEMS and Sensors........................................................... 2
Figure 3. Schematic Diagram of a MEMS Motor Complete With a Method of
Figure 7. An ISFET (Ion Sensitive Field Effect Transistor) Needle-Type pH Sensor
Figure 9. Control of an Insulin-Delivery System by an Implantable Glucose
Figure 2. Functional MEMS Micromachines Attached to Sensing Bioelectrodes....... 5
Converting Oscillatory Motion to Linear Motion ....................................... 5
Figure 4. Illustration of the Basic Physical Principle of the BioMEMS Motor ........... 6
Figure 5. Close-up Views of the Micro-Motor Gear .................................................. 6
Figure 6. An Insulin MEMS Pump............................................................................ 8
for Monitoring Tissue Physiologic Status ............................................... 11
Figure 8. A Fiber Optical Oxygen Sensor .............................................................. 12
Sensor ................................................................................................... 13
Figure 10. Glucose Oxidase .................................................................................. 14
Figure 11. An Experimental MEMS Blood Glucose Sensor ..................................... 15
Figure 12. Photomicrograph ................................................................................. 16
Figure 13. A MEMS Thermopile Glucose Sensor .................................................... 17
Figure 15. Thermopile Glucose Sensor (left) With Functional Illustration (right)
Figure 16. Photograph and Illustration of the Thermopile Glucose Sensor in a
Figure 18. A Neural Cell Showing Dendritic Inter-Connections That are Electrically
Figure 14. Illustration of the Thermocouple Principle .......................................... 18
are Made Using Photolithographic Techniques .................................... 19
Catheter .............................................................................................. 19
Figure 17. A MEMS Biopotential Electrode System................................................ 20
Active With Other Cells........................................................................ 21
Figure 19. A Neuroprosthetic Interface ................................................................ 22
Figure 20. Scanning Electron Micrograph of a Brain Electrode Array Manufactured
From Titanium and Produced by a Process of Electrodischarge
Figure 21. Scanning Electron Micrograph of a 1141 Electrode Array Made to Be
Figure 22. Polymer Based Cortical Penetrating Neuroelectrodes Made by Processes
Figure 23. A MEMS Microelectrode Array Implanted Into the Cortex of a Rat Brain
Figure 26. An Illustration of the Retinal Neuroprosthesis Created by the Boston
Figure 27. Power Transfer by Magnetic Induction to an Implanted BioMEMS Retinal
Figure 28. A New Generation of Implantable Neurostimulation Devices Can Pass
Figure 29. Illustration of the Internal Construction of the Ultrasound Powered
Machining ............................................................................................ 23
Inserted Into the Surface of the Human Brain .................................... 25
of Thin Film Deposition and RF Etching ............................................... 26
............................................................................................................ 27
Figure 24. A Representation of the Retinal Prosthesis ......................................... 28
Figure 25. A BioMEMS Fabricated 4x4 Microelectrode Retinal Array..................... 28
Implant Project ................................................................................... 29
Prosthesis ........................................................................................... 30
Through the Lumen of a Syringe Needle.............................................. 31
Neurostimulator Developed at ASU ..................................................... 32
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